NOISE INVESTIGATION OF ULTRAVIOLET-LASER INDUCED GRAIN-STRUCTURE IN POLYIMIDE FILMS

Citation
Z. Kocsis et al., NOISE INVESTIGATION OF ULTRAVIOLET-LASER INDUCED GRAIN-STRUCTURE IN POLYIMIDE FILMS, Journal of electronic materials, 25(3), 1996, pp. 549-551
Citations number
10
Categorie Soggetti
Engineering, Eletrical & Electronic","Material Science
ISSN journal
03615235
Volume
25
Issue
3
Year of publication
1996
Pages
549 - 551
Database
ISI
SICI code
0361-5235(1996)25:3<549:NIOUIG>2.0.ZU;2-Y
Abstract
The ultraviolet laser treatment of polyimide films can lead to the for mation of conductive area. The conductive layers show a carbon-rich gr ain structure. The heat treatment was carried out in air and nitrogen atmosphere. Morphology of conductive layers was investigated by scanni ng electron microscopy and transmission electron microscopy. On laser induced conductive layer, electrical noise investigation was carried o ut. Our investigation shows that laser induced layers have 1/f noise s pectra. According to our results, conductive layers prepared in nitrog en atmosphere have better stability than those prepared in air.