PYROELECTRIC INFRARED-SENSORS MADE OF LA-MODIFIED PBTIO3 THIN-FILMS AND THEIR APPLICATIONS

High sensitive pyroelectric infrared (IR) sensors have been fabricated by using c-axis oriented La-modified PbTiO3 (Pb1-xLaxTi1-x/4O3, PLT) thin films. The PLT thin films were deposited on (100)-cleaved MgO sin gle crystal substrates by intermittent rf-magnetron sputtering method. The PLT thin films have high figures of merit for IR sensor without a poling treatment. High performance pyroelectric IR sensors (single el ement type and linear array type) were fabricated by using PLT (x=0.1, gamma=5.5x10(-8) C/cm(2)K, epsilon(r)=200) thin films. The sensors ha ve remarkably high D of 3-6x10(8) cmHz(1/2)/W and very fast response. A new compact IR sensing system using the linear array sensor (8 elem ents) has been developed for a new type of room air-conditioner. This system can measure thermal distribution (8x64) by horizontal scanning of the vertical linear array. Image processing with neural network con cept makes possible high-accuracy using a few data from the sensor ele ments. This sensing system provides ''smart air-conditioning'' to impr ove the comfortable control.