STRUCTURAL AND ELECTRICAL CHARACTERIZATION OF PZT AND PLZT FILMS GROWN ON SPIN-ON PROCESSED CONDUCTIVE OXIDE ELECTRODES

Authors
KLEE M MACKENS U HERMANN W BATHELT E
Citation
M. Klee et al., STRUCTURAL AND ELECTRICAL CHARACTERIZATION OF PZT AND PLZT FILMS GROWN ON SPIN-ON PROCESSED CONDUCTIVE OXIDE ELECTRODES, Integrated ferroelectrics, 11(1-4), 1995, pp. 247
Citations number
13
Categorie Soggetti
Physics, Condensed Matter","Engineering, Eletrical & Electronic","Physics, Applied
Journal title
Integrated ferroelectrics → ACNP
ISSN journal
10584587
Volume
11
Issue
1-4
Year of publication
1995
Database
ISI
SICI code
1058-4587(1995)11:1-4<247:SAECOP>2.0.ZU;2-Y
Abstract
A spin-on processing technique has been developed to grow conductive o xide electrodes e.g. RuOx as well as stacks composed of conductive oxi de electrodes and PZT or PLZT on top of Si (100) substrates. The elect rical properties of the PZT and PLZT thin films were characterized and compared with films grown on standard Ti/Pt electrodes.