M. Klee et al., STRUCTURAL AND ELECTRICAL CHARACTERIZATION OF PZT AND PLZT FILMS GROWN ON SPIN-ON PROCESSED CONDUCTIVE OXIDE ELECTRODES, Integrated ferroelectrics, 11(1-4), 1995, pp. 247
A spin-on processing technique has been developed to grow conductive o
xide electrodes e.g. RuOx as well as stacks composed of conductive oxi
de electrodes and PZT or PLZT on top of Si (100) substrates. The elect
rical properties of the PZT and PLZT thin films were characterized and
compared with films grown on standard Ti/Pt electrodes.