A technique is described for evaluating dielectric data on ferroelectr
ic films using a Cole-Cole distribution function to separate film and
electrode capacitance and resistance. The nature of the information ob
tained, and methods for validating the conclusions are discussed. The
method is applied to lead zirconate titanate films on platinum and rut
henium oxide. Electrode capacitances are generally of the same order o
f magnitude as the film capacitance.