Hc. Lai et al., THE GROWTH OF LARGE-AREA SUPERCONDUCTING YBA2CU3O7-X THIN-FILMS BY PULSED-LASER ABLATION, Materials chemistry and physics, 43(1), 1996, pp. 66-69
In-situ growth of 2-in. diameter superconducting YBa2Cu3O7-x (YBCO) th
in films using an excimer KrF pulsed laser has been studied. Films wit
h critical transition temperature (T-c,T-0) of 89 +/- 1 K and critical
current density (J(c,77K)) in excess of 1 x 10(6) A cm(-2) have been
prepared routinely. Uniformity in film thickness of below +/- 15% and
film composition of +/- 5% have been measured. The effects of gas nozz
le geometry and target evolution during ablation on the superconductin
g properties and surface morphology of YBCO thin films have also been
investigated.