A. Holm et al., INVESTIGATION OF SURFACE ACOUSTIC-WAVES ON LINBO3, QUARTZ, AND LITAO3BY LASER PROBING, Microelectronic engineering, 31(1-4), 1996, pp. 123-127
Laser probing for the investigation of surface acoustic wave (SAW) dev
ices has been established on account of some important advantages. Non
destructive testing and phase preserved imaging of the wave field yiel
d valuable information for evaluation of the material data. In the fol
lowing, results from high accuracy phase velocity measurements on SAW-
cut crystals, e.g. 128 degrees-YX-LiNbO3 and ST-quartz will be present
ed. Moreover it is shown the detection of leaky surface acoustic waves
(LSAW) on 36 degrees-YX-LiTaO3, which is a wave mainly polarized para
llel to the surface plane. However, high sensitivity of the measuremen
t system enables the detection of the weak bending perpendicular to th
e surface.