INVESTIGATION OF SURFACE ACOUSTIC-WAVES ON LINBO3, QUARTZ, AND LITAO3BY LASER PROBING

Citation
A. Holm et al., INVESTIGATION OF SURFACE ACOUSTIC-WAVES ON LINBO3, QUARTZ, AND LITAO3BY LASER PROBING, Microelectronic engineering, 31(1-4), 1996, pp. 123-127
Citations number
7
Categorie Soggetti
Optics,"Physics, Applied","Engineering, Eletrical & Electronic
Journal title
ISSN journal
01679317
Volume
31
Issue
1-4
Year of publication
1996
Pages
123 - 127
Database
ISI
SICI code
0167-9317(1996)31:1-4<123:IOSAOL>2.0.ZU;2-G
Abstract
Laser probing for the investigation of surface acoustic wave (SAW) dev ices has been established on account of some important advantages. Non destructive testing and phase preserved imaging of the wave field yiel d valuable information for evaluation of the material data. In the fol lowing, results from high accuracy phase velocity measurements on SAW- cut crystals, e.g. 128 degrees-YX-LiNbO3 and ST-quartz will be present ed. Moreover it is shown the detection of leaky surface acoustic waves (LSAW) on 36 degrees-YX-LiTaO3, which is a wave mainly polarized para llel to the surface plane. However, high sensitivity of the measuremen t system enables the detection of the weak bending perpendicular to th e surface.