FLUORESCENCE AND LUMINESCENCE TESTING OF ELECTRONIC DEVICES WITH SNOM

Scanning Near-Field Optical Microscopy will be presented as a new and promising technique for testing of electronic devices. The non-destruc tive working principle of the instrument and contactless testing capab ility are inherent advantages of this experimental set-up. Subwaveleng th resolution can be achieved routinely under various conditions on te st samples and relevant systems of interest. Contrast mechanisms like fluorescence and luminescence are well known from the literature and c ould be applied to the electron and optical beam testing of electronic devices. Possible experimental set-ups for this kind of investigation s are discussed. The use of collection mode SNOM for registration of u ltrafast phenomena has been demonstrated [8].