Authors
Citation
J. Sprengepiel et al., DIGITAL SIGNAL MEASUREMENTS ON PASSIVATED SUBMICRON ICS BY SCANNING FORCE MICROSCOPE-TESTING, Microelectronic engineering, 31(1-4), 1996, pp. 181-186
Citations number
5
Categorie Soggetti
Optics,"Physics, Applied","Engineering, Eletrical & Electronic
Journal title
ISSN journal
01679317
Volume
31
Issue
1-4
Year of publication
1996
Pages
181 - 186
Database
ISI
SICI code
0167-9317(1996)31:1-4<181:DSMOPS>2.0.ZU;2-9
Abstract
For the first time device internal measurements of digital signals on
passivated sub micron integrated circuits (ICs) are performed with a t
est system based on a scanning force microscope (SFM). This new test t
echnique offers voltage and topographic measurements of the sample in
air within the nanometer regime. Experimental results show time resolv
ed measurements up to 3.2 GHz on 0.5 mu m passivated conducting lines.