THERMAL MAPPING WITH LIQUID-CRYSTAL METHOD

Authors
CSENDES A SZEKELY V RENCZ M
Citation
A. Csendes et al., THERMAL MAPPING WITH LIQUID-CRYSTAL METHOD, Microelectronic engineering, 31(1-4), 1996, pp. 281-290
Citations number
10
Categorie Soggetti
Optics,"Physics, Applied","Engineering, Eletrical & Electronic
Journal title
Microelectronic engineering → ACNP
ISSN journal
01679317
Volume
31
Issue
1-4
Year of publication
1996
Pages
281 - 290
Database
ISI
SICI code
0167-9317(1996)31:1-4<281:TMWLM>2.0.ZU;2-S
Abstract
Good resolution thermal mapping can be achieved by using liquid crysta ls. The article presents a new, high resolution automated measuring eq uipment, which executes the measurement and the evaluation process und er computer control. The equipment was developed especially for micro- thermography of integrated circuits. The paper presents the practical aspects of the liquid crystal measuring method. Resolution and accurac y features of the method are also discussed.