This contribution presents an automatic fault diagnosis system which i
s designed to combinational circuits and circuit modules embedded in a
scan path environment. It consists of a diagnosis software called DIA
BOLO (DIAgnosis of BOolean LOgic), an electron beam tester (EBT) and a
digital tester. A novel concept for a complete automatic fault diagno
sis process is proposed: The applied test patterns and test sequences
are specifically generated for the fault diagnosis of scan-based circu
its with support of the EBT. This approach allows the drastic reductio
n of EBT measurement times respectively the reduction of the number of
internal circuit nodes which have to be observed by the EBT. Each ste
p of the fault diagnosis process has certain requirements for the appl
ied test patterns and test sequences. Therefore, different types of te
st patterns and sequences are applied during one diagnosis run, for ex
ample, inherently periodical test patterns [1], diagnostic test patter
ns [2] and short test sequences are employed [3]. The test pattern / s
equence generation is performed automatically (which is the prerequisi
te for automatic fault diagnosis) and online, that is it depends on th
e predecessing results of the actual fault diagnosis process. Experime
nts demonstrate the feasibility of the proposed concept.