R. Hofmann et Hj. Pfleiderer, SIMULATIONS OF THE POTENTIAL DISTRIBUTION AND THE RESULTING MEASUREMENT SIGNAL IN LONGITUDINAL EXTERNAL ELECTROOPTIC PROBE TIPS, Microelectronic engineering, 31(1-4), 1996, pp. 377-384
In this paper we discuss FEM (Finite Elemente Method) simulations of t
he static electric field distribution in a longitudinal Bi12SiO20 (BSO
) probe tip which is integrated in an electro-optic measurement scheme
for the detection of waveforms on wires in integrated circuits. Numer
ical calculations of the induced birefringence and the resulting phase
-shift of the laser beam polarization made it feasible to simulate cro
sstalk from neighbouring lines and enabled us to clearify the role of
a transparent reference electrode on the magnitude of the electro-opti
c signal. Futhermore the influence of an air/alcohol gap between the c
rystal and the lines was investigated.