ADVANCED MANUFACTURING OF SIMOX FOR LOW-POWER ELECTRONICS

Silicon-on-insulator (SOI) has emerged as a key technology for low pow er electronics. The merits of SOI technology have been demonstrated, a nd are gaining acceptance in the semiconductor industry. In order for the SOI approach to be viable, several factors must converge, includin g the availability of SOI substrates in sufficient quantity, of accept able quality, and at a competitive price. This work describes developm ents in SIMOX manufacturing technology and summarizes progress in each of these areas.