Thin films of lead zirconate titanate having the composition Pb-1.05(Z
r0.53Ti0.47)O-3 were deposited by a sol-gel method on a set of crystal
line and amorphous substrates. The thickness of the him was varied by
controlling the sol concentration or by repeated coatings. Factors con
trolling phase formation in the films such as nature of the substrate
material, film thickness, chemical composition of the film, hearing ra
te and gaseous atmosphere during the heat treatment were studied. On g
lass substrates the pyrochlore phase was obtained in thin (0.4 mu m) f
ilms and the perovskite phase in thicker (>1.5 mu m) films. Crystallin
e substrates (except Si and stainless steel) yielded a perovskite phas
e in 0.6 mu m thick film. Low Zr/Ti ratio, rapid heating and introduct
ion of nitrogen in the later stage of heat treatment also favoured the
formation of the perovskite phase. It is shown that Pb deficiency in
the film caused by diffusion of Pb into amorphous substrates or by oth
er mechanisms is primarily responsible for inhibiting the pyrochlore t
o perovskite transformation. The initial crystallisation of the amorph
ous film into pyrochlore rather than a perovskite phase (as in powders
) is proposed to be due to higher strain energy barrier which exists f
or the amorphous to perovskite transformation in the film.