INCLUSIONS IN MAGNETRON-SPUTTERED YBA(2)CU(3-X)M(X)O(7-DELTA) THIN-FILMS - A STUDY BY MEANS OF ELECTRON-MICROSCOPY

Authors
VERBIST K VANTENDELOO G YE M SCHROEDER J MEHBOD M DELTOUR R
Citation
K. Verbist et al., INCLUSIONS IN MAGNETRON-SPUTTERED YBA(2)CU(3-X)M(X)O(7-DELTA) THIN-FILMS - A STUDY BY MEANS OF ELECTRON-MICROSCOPY, Microscopy microanalysis microstructures, 7(1), 1996, pp. 17-25
Citations number
16
Categorie Soggetti
Spectroscopy,Microscopy
Journal title
Microscopy microanalysis microstructures → ACNP
ISSN journal
11542799
Volume
7
Issue
1
Year of publication
1996
Pages
17 - 25
Database
ISI
SICI code
1154-2799(1996)7:1<17:IIMYT>2.0.ZU;2-J
Abstract
The microstructure of (001) YBa2Cu3O7-delta and YBa(2)Cu(3-x)M(x)O(7-d elta) (M = Zn or Fe) thin films grown by inverted cylindrical magnetro n sputtering was investigated by means of electron microscopy. The imp erfections present in the films are discussed. Special attention is pa id to nanoscale Y2O(3) inclusions. The density of [001] Y2O3 precipita tes was studied in YBa2Cu3-xZnxO7-delta and YBa2Cu3-xFexO7-delta thin films prepared under identical conditions. The density decreases for i ncreasing Zn-content and is unaffected in case of Fe-substitution.