PHYSICAL AND CHEMICAL-PROPERTIES OF THE CYLINDRICAL RODS SICX (X=0.3-1.2) GROWN FROM SI(CH3)(2)CL-2 BY LASER PYROLYSIS

The chemical and physical properties of the cylindrical rods SiCx (x = 0.3-1.2) produced by laser pyrolysis of Si(CH3)(2)Cl-2 were studied b y various methods. Although their outer features appeared smooth and u niform, they consisted of tiny melts with a size of about 20 mu m. The X-ray diffraction patterns indicated a polycrystalline structure. The elemental analysis showed that the major components were Si and C wit h atomic ratios C/Si of 0.3 and 1.2 grown by 1 and 4 W of laser radiat ion in Si(CH3)(2)Cl-2 at 135 torr, respectively. Auger spectra showed similar C/Si ratios. Furthermore, Auger depth profile spectra revealed some detailed information on the composition distribution perpendicul ar to the axis of the cylindrical rods. The electrical resistivity and its temperature dependence were measured as well as its hardness. It had a photovoltaic effect. It should be emphasized that samples with t he desired outer features, composition and physical properties could b e grown by controlling the growth conditions properly-the laser power and the pressure of Si(CH3)(2)Cl-2.