DESIGN AND FABRICATION OF MACROSCOPIC PIEZOELECTRIC ACTUATORS BASED ON THICK PZT FILMS

Large area piezoelectric actuators have been fabricated using sol gel PZT films of up to 20 mu m in thickness. The dielectric, ferroelectric and piezoelectric properties have been measured and they are consiste nt with literature values. Simple vibrational structures have been fab ricated based on both planar and coaxial substrates. At the resonant f requency, millimeter vibrations are observed. A PZT 'In-Line Fiber Opt ic Modulator' has been developed by coating a single mode optical fibe r with a sol-gel film. Phase shifts of 2 degrees are observed at 100 k Hz for a 3 kV/cm electric field.