The successful growth of MgS epitaxial layers with the MOVPE technique
is reported. The samples were grown on GaAs substrates in a classical
horizontal reactor, using bis(methylcyclopentadienyl) magnesium and H
2S as precursors. The zincblende structure of MgS layers is evidenced
by careful X-ray diffraction analysis. The lattice constant is found t
o be about 5.66 Angstrom. The influence of the growth temperature on t
he morphology and quality of the layers is studied in detail.