DIFFUSION-INDUCED DISORDERING (DID) IN ZNSSE ZNSE SUPERLATTICES/

Thermally induced disordering of ZnSSe/ZnSe superlattices was studied by X-ray diffraction, secondary-ion-mass-spectroscopy and cathodolumin escence. The structures were grown by MOVPE and annealed in H-2- or Se -atmosphere. The superlattices are found to be stable up to 750 degree s C in H-2-atmosphere whereas a heat treatment in Se-atmosphere at 590 degrees C leads to a complete intermixing. A Si3N4 cap was used to pr otect the superlattice from the Se-atmosphere and to achieve a lateral ly structured intermixing of the superlattice. The effect of lateral i ntermixing is demonstrated by spatially resolved cathodoluminescence.