The diffusion of Mn into CdTe films grown by molecular beam epitaxy (M
BE) on (100)GaAs substrates was studied by secondary ion mass spectrom
etry (SIMS). The samples were: 2 monolayer thick delta-MnTe embedded i
n either semi-insulating or in indium-doped CdTe (N-In = 1 X 10(18) cm
(-3)), and a 300 nm thick Cd0.75Mn0.25Te layer buried in undoped CdTe.
Thermal annealing was performed in H-2 atmosphere at temperatures of
333-530 degrees C with samples covered face-to-face to avoid vaporizat
ion, In the delta-MnTe samples the annealing caused symmetric spreadin
g of the Mn marker in accordance with Fick's law. The activation energ
y for diffusion of Mn in CdTe evaluated from the corresponding Arrheni
us plot is E(d) = 1.35 eV irrespective of doping. The absolute value o
f the Mn diffusivity in the In-doped CdTe is larger by a factor of 200
than that in the undoped layer. In layered CdTe/CdMnTe/CdTe structure
s the Mn-Cd interdiffusion is associated with a higher activation ener
gy than the diffusion of the diluted Mn solute. The intermixing is str
ongly asymmetric, being much more pronounced at the interface closer t
o the surface of the film.