SCANNING FORCE MICROSCOPY FOR THE STUDY OF DOMAIN-STRUCTURE IN FERROELECTRIC THIN-FILMS

Authors
GRUVERMAN A AUCIELLO O TOKUMOTO H
Citation
A. Gruverman et al., SCANNING FORCE MICROSCOPY FOR THE STUDY OF DOMAIN-STRUCTURE IN FERROELECTRIC THIN-FILMS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(2), 1996, pp. 602-605
Citations number
16
Categorie Soggetti
Physics, Applied
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
14
Issue
2
Year of publication
1996
Pages
602 - 605
Database
ISI
SICI code
1071-1023(1996)14:2<602:SFMFTS>2.0.ZU;2-D
Abstract
A piezoresponse technique based on scanning force microscopy (SFM) has been used for studying domain structure in ferroelectric thin films. Studies were performed on Pb(Zr-x,Ti-1-x)O-3(PZT) thin films produced by a sol-gel method. The piezoresponse images of the PZT films were ta ken before and after inducing polarization in the films by applying a direct current voltage between the bottom electrode and the SFM tip. P olarization induced patterns were written with 20 V pulses and subsequ ently imaged by the SFM piezoresponse technique. The effect of the fil m structure on the imaging resolution of domains is discussed. (C) 199 6 American Vacuum Society.