F. Okuyama, GROWTH OF COPPER NANOCRYSTALLITES ON COPPER SEED CONES - EVIDENCE FORTHE PRESENCE OF A LIQUID-PHASE ON AN ION-IMPACTING CONE SURFACE, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(2), 1996, pp. 768-771
The Ar+-sputter-induced ''cone evolution'' on Mo-seeded Cu is known to
entail the growth of hillocklike crystallites on the cone surface, Su
ch crystallites have now been identified as Cu, by means of high-resol
ution energy dispersive x-ray analysis, The Cu crystallites grew selec
tively on the Mo lattice of seed layers, and sometimes at the seed-lay
er apex which suffered from head-on ion impact during sputtering. The
crystallite growth was thus not a direct consequence of ion impact, le
ading to a hypothesis that a viscous overlayer of Cv on the growing Mo
lattice condensed into dewdroplike crystallites upon switching off th
e ion beam. (C) 1996 American Vacuum Society.