GROWTH OF COPPER NANOCRYSTALLITES ON COPPER SEED CONES - EVIDENCE FORTHE PRESENCE OF A LIQUID-PHASE ON AN ION-IMPACTING CONE SURFACE

Authors
Citation
F. Okuyama, GROWTH OF COPPER NANOCRYSTALLITES ON COPPER SEED CONES - EVIDENCE FORTHE PRESENCE OF A LIQUID-PHASE ON AN ION-IMPACTING CONE SURFACE, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(2), 1996, pp. 768-771
Citations number
13
Categorie Soggetti
Physics, Applied
ISSN journal
10711023
Volume
14
Issue
2
Year of publication
1996
Pages
768 - 771
Database
ISI
SICI code
1071-1023(1996)14:2<768:GOCNOC>2.0.ZU;2-C
Abstract
The Ar+-sputter-induced ''cone evolution'' on Mo-seeded Cu is known to entail the growth of hillocklike crystallites on the cone surface, Su ch crystallites have now been identified as Cu, by means of high-resol ution energy dispersive x-ray analysis, The Cu crystallites grew selec tively on the Mo lattice of seed layers, and sometimes at the seed-lay er apex which suffered from head-on ion impact during sputtering. The crystallite growth was thus not a direct consequence of ion impact, le ading to a hypothesis that a viscous overlayer of Cv on the growing Mo lattice condensed into dewdroplike crystallites upon switching off th e ion beam. (C) 1996 American Vacuum Society.