H. Yamada et al., IMAGING OF ORGANIC MOLECULAR FILMS USING A SCANNING NEAR-FIELD OPTICAL MICROSCOPE COMBINED WITH AN ATOMIC-FORCE MICROSCOPE, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(2), 1996, pp. 812-815
A scanning near-held optical microscope combined with an atomic force
microscope is described. The instrument uses a microfabricated force-s
ensing cantilever made of single-crystal silicon with an integrated p-
n diode at its end as a microphotodetector. The photosensitive cantile
ver efficiently detects the light scattered by the tip in the evanesce
nt field generated by illuminating the sample by total internal reflec
tion. Simultaneously the surface force is detected by monitoring the d
eflection of the cantilever. Both scanning near-field optical microsco
pe and atomic force microscope images of a compact disk grating and a
photosynthetic protein membrane were obtained, The membrane was deposi
ted on the glass substrate using the Langmuir-Blodgett technique. The
features in the scanning near-field optical microscope images are simi
lar to those in the atomic force microscope, The possible crosstalk be
tween the optical and the topography signal is discussed. (C) 1996 Ame
rican Vacuum Society.