T. Murdfield et al., ACOUSTIC AND DYNAMIC FORCE MICROSCOPY WITH ULTRASONIC PROBES, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(2), 1996, pp. 877-881
Ultrasonic quartz resonators with quality factors >5000 allow one to p
robe surface morphologies directly, i.e., without any additional senso
rs determining the vertical position of the probing tip. With tip radi
i of several tenths of a micrometer, hydrodynamic friction forces domi
nate the tip/surface interaction. while, by using sharp atomic force m
icroscopy tips glued onto rod-shaped 1 MHz length extension quartz res
onators, the conventional dynamical quasi noncontact atomic force micr
oscopy mode is obtained. This allows one to resolve atomically sized s
tructures on mica in air. The ultrasonic sensors with spring moduli of
3000 to 400 000 N/m exhibit an extremely high sensitivity allowing on
e to probe even monomolecular organic layers without destruction. (C)
1996 American Vacuum Society.