B. Rottger et al., ADSORPTION AND REACTION OF NO ON SI(111) STUDIED BY SCANNING-TUNNELING-MICROSCOPY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(2), 1996, pp. 1051-1054
By using scanning tunneling microscopy, low-energy electron diffractio
n, and Auger electron spectroscopy adsorption and reaction of NO on Si
(111)7x7 at 860 K and the effect of subsequent annealing to 1230 K hav
e been studied. The latter results are compared with those obtained on
a surface which has been heated to 1260 K during NO exposure. In both
cases the previously described ''8x8'' structure has been obtained. A
t 860 K etching of Si and formation of oxynitride islands are found at
the same time. In scanning tunneling microscopy the 8x8 structure app
ears as a rather regular array of protrusions in a mean distance of 8/
3 a(Si). No indications of the previously proposed coincidence lattice
structure [A. G. Schrott and S. C. Fain, Jr., Surf. Sci. 123, 204 (19
82)] are seen in the scanning tunneling microscopy results. (C) 1996 A
merican Vacuum Society.