DIGITAL ANALYSIS OF HIGH-RESOLUTION TRANSMISSION ELECTRON-MICROSCOPY LATTICE IMAGES

The method DALI (digital analysis of HRTEM lattice images) is introduc ed. Applications of DALI have been shown in previous papers. In this p aper, we give a more detailed treatment of the procedure. DALI allows the calculation of local and averaged displacements and lattice distan ces directly from HRTEM lattice images. It contains a noise reduction procedure, a procedure for lattice site detection with an error estima tion and evaluation procedures for displacements and lattice distances . As an example, DALI is applied to the investigation of a CdxZn1-xSe/ ZnSe quantum well structure.