STRAIN-INDUCED SELF-ORGANIZED GROWTH OF LATERAL PERIODIC STRAINED-LAYER SUPERLATTICES ON OFF-ORIENTED SUBSTRATES BY METALORGANIC VAPOR-PHASE EPITAXY

The strain induced self organization of lateral periodic (GaIn)As/Ga(P As) strained layer superlattice (SLS) structures is investigated as a function of strain and of the surface step configuration introduced by the substrate off-orientation. The structural properties of the sampl es, deposited by metalorganic vapour phase epitaxy (MOVPE), are determ ined by high resolution X-ray diffraction (XRD), X-ray reciprocal spac e mapping and cross-sectional as well as plan-view transmission electr on microscopy (TEM). The introduction of surface steps caused by the s ubstrate off-orientation leads to the strain induced generation of lat erally ordered macrosteps. The separation of the macrosteps depends on the off-orientation angle, but not significantly on strain. The orien tation of the macrosteps is always parallel to the direction of the su rface steps. The formation of macrosteps results in the wire-like depo sition of (GaIn)As at the macrosteps. The possibility of applying this concept for the direct deposition of quantum wire structures is brief ly discussed.