HIGH-RESOLUTION DIGITAL AUGER DATABASE OF TRUE SPECTRA FOR AUGER-ELECTRON SPECTROSCOPY INTENSITIES

An outline is presented of a new high resolution digital Auger databas e including most of the nonradioactive elements with wide scan spectra from 20 to 2500 eV at 1 eV intervals and details of the peaks at 0.1 eV intervals. These details are recorded at 0.25 eV resolution. These spectra have all instrumental contributions effectively removed. The d atabase also contains measurements for many oxides. By using a new Aug er electron spectrometer calibration system (shortly to become general ly available) these data are presented as true spectra with an intensi ty scale of sr(-1) eV(-1). By convolution with the measured instrument response function these data may be made to simulate the measurements on any analytical spectrometer or? conversely, any instrument (withou t faults) may be calibrated to produce equivalent absolute spectra. Pr edictions of theoretical Auger electron intensities, based on Gryzinsk i's cross section, Shimizu's backscattering factor, and Tanuma et nl.' s relations for the inelastic mean free path, summed to allow for Cost er-Kronig transitions, are compared with the experimental measurements after the backgrounds have been removed. Both theory and experiment, here, have no arbitrary fitting parameters and are expressed on the ab solute intensity scale in units of sr(-1). Agreement is achieved for t he first time. (C) 1996 American Vacuum Society.