M. Fehrenbacher et al., INTERACTION OF SIH4 WITH SI(100)2X1 AND WITH SI(111)7X7 AT 690 K - A COMPARATIVE SCANNING-TUNNELING-MICROSCOPY STUDY, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 14(3), 1996, pp. 1499-1504
Citations number
27
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films
We have studied the interaction of SiH4 with Si(100)2x1 and with Si(11
1)7x7 utilizing scanning tunneling microscopy. At 690 K Si deposition
does not saturate, but the reactive sticking coefficient is considerab
ly larger for Si(100)2x1. On this surface the 2x1 reconstruction is pr
eserved during deposition. The anisotropy of the newly formed islands
and the growth process are influenced by the presence of hydrogen from
dissociated SiH4. In contrast, the Si(111)7x7 surface is completely r
estructured by the interaction with SiH4. This results in the formatio
n of a bulklike hydrogen terminated 1x1 structure without any remnants
of stacking faults. After exposure to 50 000 L SiH4 at 690 K not more
than half a bilayer has grown, forming triangular Si(111)1x1-H island
s. (C) 1996 American Vacuum Society.