CHEMICAL SENSORS WITH CATALYTIC METAL GATES

Authors
LUNDSTROM I PETERSSON LG
Citation
I. Lundstrom et Lg. Petersson, CHEMICAL SENSORS WITH CATALYTIC METAL GATES, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 14(3), 1996, pp. 1539-1545
Citations number
27
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films
Journal title
Journal of vacuum science & technology. A. Vacuum, surfaces, and films → ACNP
ISSN journal
07342101
Volume
14
Issue
3
Year of publication
1996
Part
2
Pages
1539 - 1545
Database
ISI
SICI code
0734-2101(1996)14:3<1539:CSWCMG>2.0.ZU;2-4
Abstract
We first review the principles of gas sensitive field effect devices w ith catalytic metal gates. A discussion about recent experiments under ultrahigh vacuum conditions is given. More particularly, we consider the properties of the interface between the catalytic metal and the in sulator it is evaporated on. A few more of the applied research areas related to these devices are also discussed and some remaining researc h problems are suggested. (C) 1996 American Vacuum Society.