X-RAY STANDING-WAVE STUDY OF THE S-PASSIVATED INP(001) SURFACE

Citation
M. Sugiyama et al., X-RAY STANDING-WAVE STUDY OF THE S-PASSIVATED INP(001) SURFACE, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 14(3), 1996, pp. 1812-1814
Citations number
16
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films
ISSN journal
07342101
Volume
14
Issue
3
Year of publication
1996
Part
2
Pages
1812 - 1814
Database
ISI
SICI code
0734-2101(1996)14:3<1812:XSSOTS>2.0.ZU;2-T
Abstract
The adsorption position and ordering degree of S atoms on a S-passivat ed InP(001) surface were investigated by using soft-x-ray standing wav es (XSWs) in the photoelectron collection mode. Soft-x-ray photoelectr on spectroscopy for a (NH4)(2)S-x-treated and de-ionized water-rinsed InP(001) surface revealed that a small amount of residual elemental S atoms on the InP(001) surface was completely removed by postannealing at 400 degrees C in a vacuum. XSW results for the annealed sample show ed that most of the S atoms stayed at the bridge site on the In-termin ated InP(001) surface, forming In-S-In bridge bonds. (C) 1996 American Vacuum Society.