STUDY OF BURIED INTERFACES BY SOFT-X-RAY FLUORESCENCE SPECTROSCOPY EXCITED BY SYNCHROTRON-RADIATION

This article is a summary of four different aspects of soft x-ray spec troscopy that are being used or developed by our group to probe the in terface. The first is to study the change in valence band fluorescence emission by mimicking a high density of interface atoms through the u se of a multilayer. The second method uses an intense localized excite d state to characterize the buried interface. The third uses Raman sca ttering to probe changes in band structure produced by stoichiometric changes in the valence band density of states for atoms at the interfa ce. Finally, a method to study interface atoms by using valence emissi on from interface atoms that are excited by x-ray standing waves is be ing developed. (C) 1995 American Vacuum Society.