COMPARISON OF DRY-ETCHING TECHNIQUES FOR INGAP, ALINP AND ALGAP

Authors
HONG J LEE JW SANTANA CJ ABERNATHY CR LAMBERS ES PEARTON SJ HOBSON WS REN F
Citation
J. Hong et al., COMPARISON OF DRY-ETCHING TECHNIQUES FOR INGAP, ALINP AND ALGAP, Solid-state electronics, 39(7), 1996, pp. 1109-1112
Citations number
19
Categorie Soggetti
Engineering, Eletrical & Electronic","Physics, Applied","Physics, Condensed Matter
Journal title
Solid-state electronics → ACNP
ISSN journal
00381101
Volume
39
Issue
7
Year of publication
1996
Pages
1109 - 1112
Database
ISI
SICI code
0038-1101(1996)39:7<1109:CODTFI>2.0.ZU;2-A