CU METALLIZATION USING A PERMANENT-MAGNET ELECTRON-CYCLOTRON-RESONANCE MICROWAVE PLASMA SPUTTERING HYBRID SYSTEM/

A permanent magnet electron cyclotron resonance microwave plasma sourc e has been coupled to a copper sputter target to produce ionized coppe r fluxes for submicron integrated circuit metallization. A custom laun cher assembly allows the use of microwave powers up to 5 kW in a metal deposition environment to produce plasma densities >10(12) cm(-3), we ll above the cutoff density at 2.45 GHz of similar to 1x10(11) cm(-3). Six hundred nm, 1.1:1 aspect ratio features have been filled with cop per, and 250 nm, 6:1 aspect ratio features have been successfully line d. Copper ionization fractions for the conditions used for lining and filling, determined by a combination of Langmuir probe measurements an d optical emission spectroscopy, are between 10% and 35%. (C) 1996 Ame rican Vacuum Society.