Wb. Choi et al., FIELD-EMISSION FROM DIAMOND-COATED MOLYBDENUM FIELD EMITTERS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(3), 1996, pp. 2050-2055
Diamond deposition onto single Mo field emitters was accomplished by t
wo methods: microwave plasma chemical vapor deposition and a dielectro
phoresis of diamond powder. Observation by transmission electron micro
scopy and scanning electron microscopy revealed a significant amount o
f deposition at the tips. The field emission characteristics were meas
ured before and after diamond deposition on the same emitters. Field e
mission from diamond coated emitters yielded significant increases in
emission current and lower Fowler-Nordheim slopes. We discuss a possib
le mechanism to explain current enhancement that depends primarily upo
n the Mo-diamond interface. (C) 1996 American Vacuum Society.