FIELD-EMISSION FROM DIAMOND-COATED MOLYBDENUM FIELD EMITTERS

Citation
Wb. Choi et al., FIELD-EMISSION FROM DIAMOND-COATED MOLYBDENUM FIELD EMITTERS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(3), 1996, pp. 2050-2055
Citations number
18
Categorie Soggetti
Physics, Applied
ISSN journal
10711023
Volume
14
Issue
3
Year of publication
1996
Pages
2050 - 2055
Database
ISI
SICI code
1071-1023(1996)14:3<2050:FFDMFE>2.0.ZU;2-1
Abstract
Diamond deposition onto single Mo field emitters was accomplished by t wo methods: microwave plasma chemical vapor deposition and a dielectro phoresis of diamond powder. Observation by transmission electron micro scopy and scanning electron microscopy revealed a significant amount o f deposition at the tips. The field emission characteristics were meas ured before and after diamond deposition on the same emitters. Field e mission from diamond coated emitters yielded significant increases in emission current and lower Fowler-Nordheim slopes. We discuss a possib le mechanism to explain current enhancement that depends primarily upo n the Mo-diamond interface. (C) 1996 American Vacuum Society.