MICROPATTERNED POLYCRYSTALLINE DIAMOND FIELD EMITTER VACUUM DIODE-ARRAYS

Electron held emission from an array of patterned pyramids of polycrys talline diamond for vacuum diode applications has been investigated. H igh current emission from the patterned diamond microtip arrays was ob tained at low electric fields. An emission current from the diamond mi crotips of 0.1 mA was observed for a field of <10 V/mu m. Field emissi on for these diamond microtips exhibits significant enhancement in tot al emission current compared to silicon emitters. Moreover, field emis sion from patterned polycrystalline diamond pyramidal tip arrays is un ique in that the applied field is found to be lower compared to that r equired for emission from Si, Ge, GaAs, and metal surfaces. The fabric ation process utilizes selective deposition of diamond film in a silic on cavity mold and subsequent creation of free standing polycrystallin e diamond diaphragm with diamond pyramidal microtip array. The process ing techniques are compatible with integrated circuit fabrication tech nology (C) 1996 American Vacuum Society.