Tj. Vogt et al., MOLECULAR-BEAM EPITAXY GROWTH OF INGAP MULTIPLE-QUANTUM-WELL STRUCTURES ON GAP FOR OPTICAL MODULATORS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(3), 1996, pp. 2248-2251
The epitaxial growth and characterization of multiple quantum well (MQ
W) optical modulators on GaP substrates is reported. The devices were
fabricated using graded composition InGaP strain relieving buffer laye
rs and strain-compensated InGaP MQWs. The devices operate in the 570-6
20 nm wavelength range with a maximum transmission change of 15% occur
ring at 594 nm for an applied bias of -10 V. The composition range req
uired for the target wavelength range is near the indirect-direct cros
sover point for the InGaP material system and the corresponding effect
s on photoluminescence and absorption data is presented. (C) 1996 Amer
ican Vacuum Society.