COMPARISON OF (AL,GA)AS(110) GROWN BY MOLECULAR-BEAM EPITAXY WITH AS-2 AND AS-4

Citation
Mc. Holland et Cr. Stanley, COMPARISON OF (AL,GA)AS(110) GROWN BY MOLECULAR-BEAM EPITAXY WITH AS-2 AND AS-4, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(3), 1996, pp. 2305-2308
Citations number
6
Categorie Soggetti
Physics, Applied
ISSN journal
10711023
Volume
14
Issue
3
Year of publication
1996
Pages
2305 - 2308
Database
ISI
SICI code
1071-1023(1996)14:3<2305:CO(GBM>2.0.ZU;2-X
Abstract
A comparison of Si-doped (Al,Ga)As grown on on-axis GaAs(110) with As, and As-4 is reported, together with a low temperature photoluminescen ce study of cleaved edge overgrown quantum well structures. Approximat ely 90% of Si atoms are active as donors under both facet-free and fac etted (110) growth conditions with As-2, whereas using As-4, the propo rtion is reduced to 40%-60%. It is shown that cleaving at the growth t emperature (480 degrees C) rather than room temperature is essential i f the cleaved interface is to be optically active. (C) 1996 American V acuum Society.