VISUALIZATION OF LATENT IMAGES BY REFLECTION NEAR-FIELD OPTICAL MICROSCOPY

Authors
BERGOSSI O SPAJER M SCHIAVONE P
Citation
O. Bergossi et al., VISUALIZATION OF LATENT IMAGES BY REFLECTION NEAR-FIELD OPTICAL MICROSCOPY, Ultramicroscopy, 61(1-4), 1995, pp. 241-246
Citations number
7
Categorie Soggetti
Microscopy
Journal title
Ultramicroscopy → ACNP
ISSN journal
03043991
Volume
61
Issue
1-4
Year of publication
1995
Pages
241 - 246
Database
ISI
SICI code
0304-3991(1995)61:1-4<241:VOLIBR>2.0.ZU;2-A
Abstract
Near field reflection imaging on non-developed photoresists is achieve d using a dielectric probe, Preliminary results demonstrate a subwavel ength resolution uncorrelated with topographic image and a contrast re lated to the index change integrated on the layer thickness.