EFFECT OF AMMONIUM-NITRATE ON THE THERMAL-OXIDATION OF GALLIUM-ARSENIDE IN A HUMID OXYGEN ATMOSPHERE

Authors
MITTOVA IY LAVRUSHINA SS PSHESTANCHIK VR KROLENKO OV
Citation
Iy. Mittova et al., EFFECT OF AMMONIUM-NITRATE ON THE THERMAL-OXIDATION OF GALLIUM-ARSENIDE IN A HUMID OXYGEN ATMOSPHERE, Inorganic materials, 32(6), 1996, pp. 583-585
Citations number
5
Categorie Soggetti
Material Science
Journal title
Inorganic materials → ACNP
ISSN journal
00201685
Volume
32
Issue
6
Year of publication
1996
Pages
583 - 585
Database
ISI
SICI code
0020-1685(1996)32:6<583:EOAOTT>2.0.ZU;2-7
Abstract
The addition of ammonium nitrate to a humid oxygen atmosphere was foun d to increase the rate of GaAs oxidation (by a factor of 6) and the ar senic oxide content of the resulting films. The pronounced effect of a mmonium nitrate is attributed to the presence of nitrogen in different oxidation states.