EFFECT OF COMBINED TREATMENT ON THE OXIDATION OF TITANIUM FILMS

Authors
NUPRIENOK IS SHIBKO AN
Citation
Is. Nuprienok et An. Shibko, EFFECT OF COMBINED TREATMENT ON THE OXIDATION OF TITANIUM FILMS, Inorganic materials, 32(6), 1996, pp. 633-635
Citations number
4
Categorie Soggetti
Material Science
Journal title
Inorganic materials → ACNP
ISSN journal
00201685
Volume
32
Issue
6
Year of publication
1996
Pages
633 - 635
Database
ISI
SICI code
0020-1685(1996)32:6<633:EOCTOT>2.0.ZU;2-9
Abstract
Oxidation of titanium films during thermal annealing accompanied by ir radiation at hv = 2.25-2.80 eV was studied by electron microscopy and electron diffraction.