A. Anselmo et al., FULL-SCALE EXPERIMENTS ON SOLID-PELLETS FEED CONTINUOUS CZOCHRALSKI GROWTH OF SILICON-CRYSTALS, Journal of crystal growth, 163(4), 1996, pp. 359-368
Two long-term solid-pellets feed continuous Czochralski growth experim
ents were performed in an industrial Czochralski crystal puller as an
extension to our previous work [7]. The goals of these experiments wer
e to examine how polysilicon pellets would melt in a standard Cz syste
m, to discover the thermal effects the pellets would have on the overa
ll melt, and to find if pellet addition could be an effective melt rep
lenishment technique. These experiments demonstrate that the quality o
f the melt for the CCz growth is based heavily on the surface temperat
ure of the melt. A novel characterization method (''impact severity'')
is developed to characterize the quality of the CCz melt. Stable feed
rate and melt conditions were achieved for three different pull rates
. These experiments demonstrate that the process is technically feasib
le, and can be retrofitted to the existing industrial systems. Several
critical issues that need to be addressed to develop a successful CCz
process are also discussed.