Sidegating (backgating) effects in a planar structure with sidegate on
the same side as MESFET are studied by two-dimensional simulation and
the results are compared with those for a structure with a backgate o
n the back side of the substrate. The kink-related sidegating is repro
duced in the planar structure, too. Its mechanism is discussed and is
attributed to the change of EL2's role from an electron trap to a reco
mbination center by capturing holes, which are generated by impact ion
ization and how into the semi-insulating substrate including EL2 (deep
donor). The dependence of shallow acceptor density in the semi-insula
ting substrate is also studied. It is shown that the kink-related side
gating is less remarkable in the case with lower acceptor density in t
he substrate. Potential dependence of sidegating effects on the sidega
te (backgate) position is also discussed. Copyright (C) 1996 Elsevier
Science Ltd