DEPOSITION OF DIAMOND-LIKE CARBON-FILMS ON AN IRON SUBSTRATE BY A PULSED HIGH-DENSITY PLASMA BEAM AT ROOM-TEMPERATURE

Diamond-like carbon (DLC) films were produced on the surface of a pure iron substrate at room temperature using a pulsed high-density plasma beam from a coaxial plasma gun. DLC films have a wide mixing interlay er with substrates, which can improve their adhesion to the substrates . The plasma density ranged between 10(14) and 10(16) cm(-3), the plas ma electron temperature was 10-50 eV, the mean plasma speed 30-50 km s (-1), and the pulse width about 60 mu s. Hardness and thickness measur ements, a scratch tester, Raman spectroscopy, Auger electron spectrosc opy, and X-ray diffraction were used to characterize the DLC films.