We report, for the first time, an epitaxially grown InP p(+)/n(++) tun
nel junction. A diode with peak current densities up to 1600 A/cm(2) a
nd maximum specific resistivities (V-p/I-p peak voltage to peak curren
t ratio) in the range of 10(-4) Omega . cm(2) is obtained. This peak c
urrent density is comparable to the highest results previously reporte
d for lattice-matched In0.53Ga0.47As tunnel junctions. Both results we
re obtained using chemical beam epitaxy (CBE). In this paper we discus
s the electrical characteristics of these tunnel diodes and how the gr
owth conditions influence them.