DIFFUSE-SCATTERING BY MICRODEFECTS IN SILICON

Authors
ZOTOV NM BUBLIK VT
Citation
Nm. Zotov et Vt. Bublik, DIFFUSE-SCATTERING BY MICRODEFECTS IN SILICON, Inorganic materials, 32(7), 1996, pp. 692-695
Citations number
10
Journal title
Inorganic materials → ACNP
ISSN journal
00201685
Volume
32
Issue
7
Year of publication
1996
Pages
692 - 695
Database
ISI
SICI code
0020-1685(1996)32:7<692:DBMIS>2.0.ZU;2-K
Abstract
The types of microdefects present in silicon crystals of different the rmal history were studied by x-ray diffuse scattering. It is shown tha t crystal regions formed in both interstitial and vacancy growth regim es contain microdefects, giving rise to both positive and negative lat tice dilatation.