DIAMOND-LIKE CARBON-FILM SYNTHESIZED BY ION-BEAM-ASSISTED DEPOSITION AND ITS TRIBOLOGICAL PROPERTIES

Ion beam assisted deposition offers a novel and unique process to prep are diamond-like carbon (DLC) films at room temperature with particula rly good interface adhesion. This advantage is explored to deposit hig hly wear resistant DLC coating on AISI 52100 steel. Various bombarding species and energy are examined to optimize the process. Infrared, Ra man, Auger electron spectroscopy spectra, and hardness measurements ar e used to characterize the structure and properties of DLC films. The friction and wear behavior of DLC films are systematically investigate d by performing extensive experiments in different testing styles. It is disclosed that by means of a dynamic mixing of atoms in interfaces, a pure metal intermediate layer can tremendously improve the tribolog ical properties of DLC films on 52100 steel. The results are optimisti c and may lead to useful applications. (C) 1996 American Vacuum Societ y.