PHYSICAL-PROPERTIES OF DIAMOND-LIKE CARBON-FILMS DEPOSITED IN MIXED ATMOSPHERES OF C2H4-AR, C2H4-H-2, AND C2H4-N-2

Citation
M. Nakayama et al., PHYSICAL-PROPERTIES OF DIAMOND-LIKE CARBON-FILMS DEPOSITED IN MIXED ATMOSPHERES OF C2H4-AR, C2H4-H-2, AND C2H4-N-2, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 14(4), 1996, pp. 2418-2426
Citations number
20
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films
ISSN journal
07342101
Volume
14
Issue
4
Year of publication
1996
Pages
2418 - 2426
Database
ISI
SICI code
0734-2101(1996)14:4<2418:PODCDI>2.0.ZU;2-R
Abstract
Diamondlike carbon films were deposited in a pure C2H4 atmosphere and in mixed atmospheres of C2H4-Ar, C2H4-H-2, and C2H4-N-2 by radio frequ ency plasma chemical vapor deposition. The partial pressures of Ar, H- 2, and N-2 were 25%, 50%, and 66.7%, respectively. The films were depo sited with a high negative bias of -610 V. The hardness, the density, and the internal stress of the films decrease and the amount of gas ev olution increases with increasing partial pressures of N, and H-2, whi le they do not depend on the partial pressure of Ar. These results sho w that N-2 and H-2 react with carbon in the films and decrease the deg ree of the crosslinking in the network structure, while Ar does not ch ange the degree of crosslinking. The surface is very flat and the roug hness (R(max)) is below 1 nm. The hardness is 40 GPa for the films dep osited in atmospheres of pure C2H4 and mixed C2H4-Ar with a bias of -6 10 V. (C) 1996 American Vacuum Society.