M. Nakayama et al., PHYSICAL-PROPERTIES OF DIAMOND-LIKE CARBON-FILMS DEPOSITED IN MIXED ATMOSPHERES OF C2H4-AR, C2H4-H-2, AND C2H4-N-2, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 14(4), 1996, pp. 2418-2426
Citations number
20
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films
Diamondlike carbon films were deposited in a pure C2H4 atmosphere and
in mixed atmospheres of C2H4-Ar, C2H4-H-2, and C2H4-N-2 by radio frequ
ency plasma chemical vapor deposition. The partial pressures of Ar, H-
2, and N-2 were 25%, 50%, and 66.7%, respectively. The films were depo
sited with a high negative bias of -610 V. The hardness, the density,
and the internal stress of the films decrease and the amount of gas ev
olution increases with increasing partial pressures of N, and H-2, whi
le they do not depend on the partial pressure of Ar. These results sho
w that N-2 and H-2 react with carbon in the films and decrease the deg
ree of the crosslinking in the network structure, while Ar does not ch
ange the degree of crosslinking. The surface is very flat and the roug
hness (R(max)) is below 1 nm. The hardness is 40 GPa for the films dep
osited in atmospheres of pure C2H4 and mixed C2H4-Ar with a bias of -6
10 V. (C) 1996 American Vacuum Society.