SURFACE FLATNESS OF POLISHED METAL SINGLE-CRYSTALS

Authors
Citation
Ce. Tripa et Jt. Yates, SURFACE FLATNESS OF POLISHED METAL SINGLE-CRYSTALS, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 14(4), 1996, pp. 2544-2546
Citations number
10
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films
ISSN journal
07342101
Volume
14
Issue
4
Year of publication
1996
Pages
2544 - 2546
Database
ISI
SICI code
0734-2101(1996)14:4<2544:SFOPMS>2.0.ZU;2-U
Abstract
The Fizeau interference has been utilized to measure the flatness of a metal single crystal after grinding and polishing by standard techniq ues. It is postulated that deviations from flatness are due to distort ions of flexible abrasive substrates during the grinding step. (C) 199 6 American Vacuum Society.