MINIMUM PROFILE ULTRAHIGH-VACUUM GATE VALVE BASED ON LINEAR ROTARY MOTION FEEDTHROUGH/

Authors
STOLOW A
Citation
A. Stolow, MINIMUM PROFILE ULTRAHIGH-VACUUM GATE VALVE BASED ON LINEAR ROTARY MOTION FEEDTHROUGH/, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 14(4), 1996, pp. 2669-2670
Citations number
2
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films
Journal title
Journal of vacuum science & technology. A. Vacuum, surfaces, and films → ACNP
ISSN journal
07342101
Volume
14
Issue
4
Year of publication
1996
Pages
2669 - 2670
Database
ISI
SICI code
0734-2101(1996)14:4<2669:MPUGVB>2.0.ZU;2-K
Abstract
A simple, very low profile (< 1 in.) ultrahigh vacuum gate valve for i solation of molecular beam sources is described. The radial gate drive is based upon a linear/rotary motion feedthrough. A novel coupling sc heme is described where the linear motion is used to translate the gat e while the rotary motion is used to independently raise and lower the gate. A molecular beam skimmer, mounted on the gate, may be accuratel y and reproducibly located. (C) 1996 American Vacuum Society.