HOLLOW-CATHODE ASSISTED SPUTTERING

Authors
BACKHOUSE CJ DEW SK BRETT MJ
Citation
Cj. Backhouse et al., HOLLOW-CATHODE ASSISTED SPUTTERING, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 14(4), 1996, pp. 2674-2676
Citations number
10
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films
Journal title
Journal of vacuum science & technology. A. Vacuum, surfaces, and films → ACNP
ISSN journal
07342101
Volume
14
Issue
4
Year of publication
1996
Pages
2674 - 2676
Database
ISI
SICI code
0734-2101(1996)14:4<2674:HAS>2.0.ZU;2-S